Evaluation of glancing angle X-ray diffraction and MeV 4He backscattering analyses of silicide formation

Principles and applications of ion beam techniques for the analysis of solids and thin films

J. W. Mayer, M‐A. Nicolet, T.M. Buck et al. · Thin Solid Films · 1973 · 332 citations

Natural Sciences, Materials Science, Physics +12

Growth Kinetics Observed in the Formation of Metal Silicides on Silicon

R.W. Bower, J. W. Mayer · Applied Physics Letters · 1972 · 179 citations

Engineering, Materials Engineering, Materials Science +17

Ohmic contacts to semiconductors

D.W. Satchell · Thin Solid Films · 1970 · 156 citations

Engineering, Electrical Engineering, Materials Science +12

The growth and transformation of Pd2Si on (111), (110) and (100) Si

Gudrun A. Hutchins, A. Shepela · Thin Solid Films · 1973 · 125 citations

Natural Sciences, Materials Engineering, Materials Science +9

Seeman–Bohlin X-ray diffractometer for thin films

B. S. Berry · Journal of Applied Crystallography · 1970 · 123 citations

Natural Sciences, Materials Engineering, Materials Science +16