Publication | Closed Access
Effect of microstructure on the erosion and impact damage of sintered silicon nitride
44
Citations
7
References
1991
Year
Materials EngineeringMaterials ScienceEngineeringSintered Silicon NitrideMicrofabricationApplied PhysicsImpact DamageSemiconductor Device FabricationSilicon On InsulatorMechanics Of MaterialsMicrostructure
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