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Investigation of composition uniformity of MoSix sputtering films based on measurement of angular distribution of sputtered atoms

Toshinari Yamazaki, N. Ikeda, H. Tawara, Minoru Sato

Thin Solid Films · 1993 · 21 citations · 4 references

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4

Mass effects on angular distribution of sputtered atoms

R. R. Olson, M. King, G. K. Wehner · Journal of Applied Physics · 1979 · 109 citations

, , +13

Angular distribution of particles sputtered from metals and alloys

A. Wucher, W. Reuter · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1988 · 43 citations

, , +16

Effect of Angular Distribution of Ejected Atoms from a Target on the Uniformity of Thickness and Composition of MoSi<sub>x</sub> Sputtering Films

Toshinari Yamazaki, Kenji Matsuda, H. Nakatani · Japanese Journal of Applied Physics · 1990 · 26 citations

, , +13

Compositional difference between films and targets in sputtering of refractory metal silicides

Yoshio Murakami, Takayuki Shingyoji · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1990 · 19 citations

, , +16