Concepedia
Thin Solid Films · 1967 · 10 citations · 2 references
Materials EngineeringMaterials ScienceMaterial AnalysisEngineeringApplied PhysicsSheet Resistance ControlThin FilmsThin Film Processing
2
Dielectric Thin Films through rf Sputtering
P. D. Davidse, L. I. Maissel · Journal of Applied Physics · 1966 · 168 citations
Dielectrics, Engineering, Glow Discharge +19
Materials and Processes for Passive Thin-Film Components
R. Glang · Journal of Vacuum Science and Technology · 1966 · 18 citations
Engineering, Radio Frequency, Passive Thin-film Components +18