Publication | Closed Access
Charge trapping on different cuts of a single-crystalline α-SiO2
46
Citations
11
References
1993
Year
Electrical EngineeringEngineeringSingle-crystalline α-Sio2Crystalline DefectsTrapped ChargesSurface ScienceApplied PhysicsCondensed Matter PhysicsAtomic PhysicsCharge ExtractionSemiconductor MaterialDefect DensityCharge SeparationScanning Electron MicroscopeIon EmissionCharge Transport
A scanning electron microscope is employed for the investigation of charging on different cuts of an α-SiO2. A method for the determination of trapped charges is proposed. Charging on different cuts is observed to decrease in the order of z cut, 30° cut, 45° cut, and 60° cut of the α-SiO2. This phenomenon is related to permittivity, defect density, and stress of the samples. Details of the experiments and the method of charge determination are given.
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