Concepedia

Synthesis and characterization of carbon nitride thin films prepared by rf plasma enhanced chemical vapor deposition

G.Q. Yu, Suk‐Ha Lee, D.-G. Lee, H.-D. Na, H.-S. Park, Jae‐Joon Lee

Surface and Coatings Technology · 2002 · 17 citations · 29 references

DOI

Concepts

References

29

High-Resolution X-Ray Photoemission Spectrum of the Valence Bands of Gold

D. A. Shirley · Physical review. B, Solid state · 1972 · 6.2K citations

, , +15

Symmetry breaking in nitrogen-doped amorphous carbon: Infrared observation of the Raman-active<i>G</i>and<i>D</i>bands

James H. Kaufman, S. Metin, David D. Saperstein · Physical review. B, Condensed matter · 1989 · 736 citations

, , +15

Crystalline carbon nitride films formation by chemical vapor deposition

Yafei Zhang, Zhonghua Zhou, Hu‐Lin Li · Applied Physics Letters · 1996 · 143 citations

, , +13

Research on carbon nitrides

E Wang · Progress in Materials Science · 1997 · 135 citations

, , +8

Effect of chemical sputtering on the growth and structural evolution of magnetron sputtered CNx thin films

Niklas Hellgren · Thin Solid Films · 2001 · 99 citations

, , +12