Transmission electron microscopy of amorphization and phase transformation beneath indents in Si

H. Saka, A. Shimatani, Motohiro Suganuma, Not Available Not Available

Philosophical magazine. A/Philosophical magazine. A. Physics of condensed matter. Structure, defects and mechanical properties · 2002 · 40 citations · 19 references

Concepts

Abstract

Abstract The microstructure beneath indents, with three different tip shapes (spherical, Vickers and Berkovich), in Si was examined using transmission electron microscopy. The focused-ion beam technique was applied to the preparation of specimens for cross-sectional observation. Activation of dislocations, cracking, phase transformation and amorphization were observed.

References

19