Publication | Closed Access
Fabricating high-aspect-ratio sub-diffraction-limit structures on silicon with two-photon photopolymerization and reactive ion etching
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Citations
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References
2004
Year
Materials SciencePhotonicsEngineeringTwo-photon PhotopolymerizationBeam LithographyMicrofabricationOptical PropertiesPhotonic MaterialsApplied PhysicsOptoelectronic DevicesMicro-optical ComponentNanolithography MethodPhotonic DeviceOptoelectronicsHigh-aspect-ratio Sub-diffraction-limit StructuresReactive IonDiffractive Optic
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