2012 · 11 citations · 10 references
EngineeringElectrical EngineeringMaterials ScienceElectronic MaterialsMicroelectromechanical SystemsMicrowave EngineeringCrystalline MaterialsMems MaterialsMicrowave OscillatorsOscillatorsRf MemsCrystal OscillatorsInertial MemsMicromechanical OscillatorsQuartzRadio-frequency Devices
Quartz crystal has been an essential material for time and frequency and radio-frequency applications during the 20 <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">th</sup> century. Quartz is always an unmatched material at the beginning of the 21 <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">st</sup> century, and hold 80 % of oscillators & RF market which represent today 17 billions market with a 10 % growth per year. This paper describes other more confidential applications - the vibrating inertial MEMS - where the quartz crystal plays also a major role. Clearly, quartz crystal has still a future in these high added value applications, and for a long time.
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Clarence Zener · Proceedings of the Physical Society · 1940 · 99 citations
A New Quartz Monolithic Differential Vibrating Beam Accelerometer
O. Le Traon, D. Janiaud, M. Pernice et al. · 2006 · 41 citations
Engineering, Mechanical Engineering, Mechatronics Engineering +17
An overview of quartz MEMS devices
Masako Tanaka · 2010 · 28 citations
The VIA vibrating beam accelerometer: concept and performance
O. Le Traon, D. Janiaud, Serge Muller et al. · 2002 · 27 citations
Engineering, Aerospace Engineering, Mechanical Engineering +17