Surface and Coatings Technology · 2010 · 22 citations · 11 references
Natural SciencesMaterials EngineeringMaterials ScienceMaterials ChemistrySurface ScienceThin FilmsAmorphous MaterialsAmorphous SolidsChemical Vapor DepositionThin Film Mechanical PropertiesThin Film Thermal PropertiesAmorphous CarbonAmorphous Thin FilmsAtmospheric PressureAtmospheric Pressure DependenceCarbon MaterialsPhysical PropertiesSubstrate Temperature Effects
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Stable glow plasma at atmospheric pressure
Seiji Kanazawa, Masuhiro Kogoma, Takao Moriwaki et al. · Journal of Physics D Applied Physics · 1988 · 684 citations