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Nonlinear tracking control of vibration amplitude for a parametrically excited microcantilever beam

Microcantilever BeamVibration AmplitudeEngineeringMicrofabricationMechanical EngineeringMechatronicsMechanical SystemsActive Vibration ControlNonlinear Vibration ControlMicroactuatorMicro-electromechanical SystemVibration ControlNonlinear Vibration