Chemical vapor deposition of amorphous ruthenium–phosphorus alloy films

Jinhong Shin, Abdul Waheed, Wyatt Winkenwerder, Hyunwoo Kim, Kyriacos Agapiou, Richard A. Jones, Gyeong S. Hwang, John G. Ekerdt

Thin Solid Films · 2007 · 41 citations · 33 references

Concepts

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