Doping of silicon by ion implantation

THE RANGE OF ALKALI METAL IONS OF KILOELECTRON VOLT ENERGIES IN ALUMINUM

John Davies, John D. McIntyre, R. L. Cushing et al. · Canadian Journal of Chemistry · 1960 · 89 citations

Natural Sciences, Chemistry, Inorganic Chemistry +6

Doping of Crystals by Ion Bombardment to Produce Solid State Detectors

T. Alväger, N.J. Hansen · Review of Scientific Instruments · 1962 · 39 citations

Engineering, Nuclear Engineering, Solid State Physics +4

Junction Formation in Silicon by Positive Ion Bombardment

R. R. Ferber · IEEE Transactions on Nuclear Science · 1963 · 14 citations

Engineering, Electrical Engineering, Materials Science +17