Journal of The Electrochemical Society · 1982 · 43 citations · 0 references
EngineeringMaterials EngineeringMaterials ScienceSemiconductor MaterialsSurface ScienceThin FilmsCarrier TransportGas SensorsSemiconductor PhysicsSemiconductor SurfacesSemiconductor Thin FilmsThin-film MaterialsCarrier ConcentrationCharge Carrier DensityCharge NeutralityPolycrystalline Semiconductor FilmsPolycrystalline Thin FilmsSemiconductor Gas SensorsSemiconductor Oxide Thin FilmsSurface Potential
An analysis employing Poisson's equation is used to determine surface potential and effective carrier concentration as a function of N/sub ss/, the surface acceptor concentration, for a particular set of material parameters in RF- sputtered ZnO thin films. The results are used to obtain a semiquantitative description of gas sensitivity addressing electronic processes of the gas-solid system. The analysis involves numerical solution of Poisson's equation and the charge neutrality equation simultaneously. 8 refs.