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Photoresist materials: a historical perspective
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1997
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Materials ScienceResist MaterialsPhotoresist MaterialsArt HistoryEngineeringSpecific ResistanceResistorOptical PropertiesMaterial PropertyMaterials CharacterizationApplied PhysicsElectron-beam LithographyPhotopolymer NetworkNm Resist MaterialsShort HistoryPhotoelasticity
This paper provides a short history of the development of resist materials. We trace the development of resists from the very beginnings of photography in the early 1800s to today's efforts to develop 193 nm resist materials.