Publication | Open Access
Characterization of the First FBK High-Density Cell Silicon Photomultiplier Technology
65
Citations
13
References
2013
Year
Short Wavelength OpticOptical MaterialsEngineeringCell Silicon PhotomultipliersIntegrated CircuitsSilicon On InsulatorSemiconductorsPhotoelectric SensorCell SizePhotonic Integrated CircuitPhotonicsElectrical EngineeringPhotoluminescencePhysicsPhotoelectric MeasurementSemiconductor Device FabricationApplied PhysicsAdvanced PrototypeOptoelectronics
In this paper, we present the results of the characterization of the first high-density (HD) cell silicon photomultipliers produced at FBK. The most advanced prototype manufactured with this technology has a cell size of 15 × 15 μm <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> featuring a nominal fill factor of 48%. To reach this high area coverage, we developed a new border structure to confine the high electric-field region of each single-photon avalanche diode. The measured detection efficiency approaches 30% in the green part of the light spectrum and it is above 20% from 400 to 650 nm. At these efficiency values, the correlated noise is very low, giving an excess charge factor below 1.1. We coupled a 2 × 2 × 10- mm <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">3</sup> LYSO scintillator crystal to a 2.2 × 2.2- mm <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> silicon photomultiplier, obtaining very promising results for PET application: energy resolution of less than 11% full-width at half maximum (FWHM) with negligible loss of linearity and coincidence resolving time of 200-ps FWHM at 20°C.
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