A high performance one-dimensional homodyne encoder and the proof of principle of a novel two-dimensional homodyne encoder

Determination and correction of quadrature fringe measurement errors in interferometers

Peter L. M. Heydemann · Applied Optics · 1981 · 420 citations

Engineering, Astronomy, Metrology +14

High-resolution, high-speed, low data age uncertainty, heterodyne displacement measuring interferometer electronics

Frank C. Demarest · Measurement Science and Technology · 1998 · 175 citations

Engineering, Electrical Engineering, Instrumentation +15

Technology and applications of grating interferometers in high-precision measurement

Arnold Teimel · Precision Engineering · 1992 · 128 citations

Engineering, Electrical Engineering, Instrumentation +11

A heterodyne interferometer with periodic nonlinearities smaller than ±10 pm

Christoph Weichert, Paul Köchert, Rainer Köning et al. · Measurement Science and Technology · 2012 · 88 citations

Natural Sciences, Electrical Engineering, Optics +16

Phase measurement of various commercial heterodyne He–Ne-laser interferometers with stability in the picometer regime

Paul Köchert, Jens Flügge, Ch. Weichert et al. · Measurement Science and Technology · 2012 · 65 citations

Engineering, Electrical Engineering, Instrumentation +16