An evaluation of a modulated laser encoder

Technology and applications of grating interferometers in high-precision measurement

Arnold Teimel · Precision Engineering · 1992 · 128 citations

Engineering, Electrical Engineering, Instrumentation +11

Optical heterodyne grating interferometry for displacement measurement with subnanometric resolution

Ju Yi Lee, Hui-Yi Chen, Cheng-Chih Hsu et al. · Sensors and Actuators A Physical · 2007 · 89 citations

Engineering, Electrical Engineering, Optics +15

Diffractive Laser Encoder with a Grating in Littrow Configuration

Ching-Fen Kao, Sheng-Hua Lu, Hsin-Mao Shen et al. · Japanese Journal of Applied Physics · 2008 · 62 citations

Engineering, Mechatronics Engineering, Metrology +16

Reflection type heterodyne grating interferometry for in-plane displacement measurement

Cheng-Chih Hsu, Chyan-Chyi Wu, Ju-Yi Lee et al. · Optics Communications · 2008 · 48 citations

Engineering, Electrical Engineering, Optics +13

High-resolution laser linear encoder with numerical error compensation

Marek Dobosz · Optical Engineering · 1999 · 23 citations

Engineering, Electrical Engineering, Metrology +16