Terahertz and optical study of monolayer graphene processed by plasma oxidation

Abstract

We report on our terahertz and optical study of monolayer graphene grown by chemical vapor deposition and processed by plasma oxidation. The plasma oxidation induces oxygen-related defects, and the resulting disorder increases the sheet resistance of graphene as measured via terahertz spectroscopy. The excitonic absorption peak weakens considerably and blue shifts upon plasma oxidation, resulting in higher transmittance in both the visible and ultraviolet regions. Our oxygen plasma-treated graphene also exhibits a free-carrier doping effect as confirmed by the blue shift of the Raman G band.