Surface Review and Letters · 2006 · 10 citations · 9 references
Natural SciencesMaterials EngineeringMaterials ScienceCeramicsMechanical Behavior Of MaterialsNanomaterialsAlloysCoating TechnologyCoatingsFracture ToughnessMetalsThin Film Mechanical PropertiesCompressive ModulusCritical Load AnalysisFracture Under Compressive LoadHard CoatingsNanocrystalline AlloysNanomaterial-enhanced Mechanical PropertiesNanostructured Coatings
The influence of substrate rotary speed, species of reaction gases and flows on nanoindentation, nanoscratch fracture, and residual stress were explored on reactive sputtered nanoscale CrN / ZrN multilayered coatings. Hardness and critical fracture load as high as 32 GPa and 85 mN with desirable compressive stress were achieved for this model. A proper percentage of NH 3 in N 2 reaction gas was also proved to be of benefit to synthesize high-hard and fracture-resistant CrN / ZrN coatings. The low-angle XRD patterns provided the layer modulation period of the coatings. A marked polycrystallite of two-cubic NaCl phase CrN + ZrN as well as probably hexagonal Cr 2 N with small modulation period corresponded to the enhanced mechanical properties.
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Optical and electronic properties of magnetron sputtered ZrNx thin films
R. Lamni, Elena Martínez, Simon Springer et al. · Thin Solid Films · 2003 · 59 citations