Improved depth resolution of secondary ion mass spectrometry profiles in diamond: A quantitative analysis of the delta-doping - Concepedia

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Improved depth resolution of secondary ion mass spectrometry profiles in diamond: A quantitative analysis of the delta-doping

DOI Full Paper Access

23

Citations

18

References

2013

Year

Alexandre Fiori, François Jomard, Tokuyuki Teraji, Gauthier Chicot, E. Bustarret

Thin Solid Films

Diamond-like CarbonEngineeringAnalytical InstrumentationNatural SciencesSpectroscopyMass SpectrometryApplied PhysicsQuantitative AnalysisMicroanalysisAnalytical ChemistryChemistryInstrumentationDepth ResolutionCrystallography

References

	Year	Citations

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