Pushing the resolution of photolithography down to 15nm by surface plasmon interference - Concepedia

Concepedia

Publication | Open Access

Pushing the resolution of photolithography down to 15nm by surface plasmon interference

DOI Full Paper Access

74

Citations

32

References

2014

Year

Jianjie Dong, Juan Liu, Guoguo Kang, Jinghui Xie, Yongtian Wang

Scientific Reports

References

	Year	Citations

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