Publication | Closed Access
Thermal characterisation of micro-hotplates used in sensor structures
37
Citations
4
References
2004
Year
EngineeringMicrofabricationThermal CharacterisationMechanical EngineeringTemperature MeasurementThermal AnalysisThermodynamicsHeat TransferInstrumentationElectronic PackagingThermal EngineeringThermal Sensor
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