Concepedia

Development of a miniature clark-type oxygen electrode using semiconductor techniques and its improvement for practical applications

Hiroaki Suzuki, Naomi Kojima, Akio Sugama, Fumio Takei

Sensors and Actuators B Chemical · 1990 · 20 citations · 3 references

DOI

Concepts

References

3

Silicon as a mechanical material

K. Petersen · Proceedings of the IEEE · 1982 · 2.9K citations

, , +13

Anisotropic Etching of Silicon

D. B. Lee · Journal of Applied Physics · 1969 · 307 citations

, , +15

Fabrication of an oxygen electrode using semiconductor technology

Hiroaki Suzuki, Eiichi Tamiya, Isao Karube · Analytical Chemistry · 1988 · 64 citations

, , +10