128 × 128 deformable mirror device

Abstract

The deformable mirror device (DMD) is an <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">X-Y</tex> array of deformable mirror elements addressed by an underlying array of MOS transistors. Applications include optical information processing and projection displays. The architecture, operation, and experimental results are presented for a 128 × 128 DMD.