A MEMS micromirror fabricated using CMOS post-process - Concepedia

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A MEMS micromirror fabricated using CMOS post-process

30

Citations

14

References

2005

Year

Ying-Chou Cheng, Ching‐Liang Dai, Chi‐Yuan Lee, Ping‐Hei Chen, Pei‐Zen Chang

Sensors and Actuators A Physical

EngineeringMicrofabricationMems MicromirrorInstrumentationMicro-optical ComponentMicroelectronicsMicro-electromechanical SystemMicrofluidics

References

	Year	Citations

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