Well-ordered nanopore arrays in rutile TiO₂single crystals by swift heavy ion-beam lithography

Abstract

Ion track lithography has been applied for transferring the self-ordered nanopattern of porous anodic alumina to single-crystalline rutile TiO2 substrates. As a result, nanometre resolved arrays have been fabricated with an aspect ratio ranging from 5 to 16, over areas of several square millimetres. Differences in the expected aspect ratio of the resulting nanopores in rutile TiO2 single crystals are analysed and discussed. Some of these differences may be ascribed to varying densities of the mask material.