Lead-zirconate-titanate-based piezoelectric micromachined switch

Abstract

A piezoelectric microelectromechanical switch actuated by lead zirconate titanate (PZT) is reported. A PZT unimorph cantilever actuator, fabricated on a sacrificial polysilicon layer and released using a xenon difluoride dry etch, was used to realize the switch. The PZT thin film was poled and driven with interdigitated electrodes to exploit the d33 coefficient for switching actuation. Preliminary dc and rf switching characteristics are reported. Measurements indicate a fast switching “on” time of <2 μs and “off” time of 2 μs at an actuation voltage of <40 V. An on/off isolation of >25 dB was achieved up to 100 MHz.