Concepedia

Production of ultra-high-purity polycrystalline silicon

Journal of Crystal Growth · 1986 · 20 citations · 0 references

Concepts

EngineeringMaterials EngineeringMaterials ScienceElectronic MaterialsManufacturing ProcessesSemiconductor DevicesFabrication MaterialsSemiconductor Crystal GrowthSemiconductor Device MaterialsSilicon MaterialsPolycrystalline SiliconSiliconSilicon Impurities