Hard coatings (TiN, TixAl1−xN) deposited at room temperature by energetic cluster impact

Filling of micron-sized contact holes with copper by energetic cluster impact

Hellmut Haberland, Martin Mall, Michael Moseler et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1994 · 389 citations

Engineering, Electrical Engineering, Materials Science +7

Structure and properties of titanium nitride thin films deposited at low temperatures using direct current magnetron sputtering

F. Elstner, Andreas Ehrlich, H. Giegengack et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1994 · 77 citations

Natural Sciences, Materials Engineering, Materials Science +16

ENERGETIC CLUSTER IMPACT (ECI): A NEW METHOD FOR THIN-FILM FORMATION

Hellmut Haberland, Michael Moseler, You Qiang et al. · Surface Review and Letters · 1996 · 66 citations

Natural Sciences, Materials Science, Physics +7

Properties of TiCN coatings prepared by magnetron sputtering

Jianguo Deng, Manuel Braun, I. Gudowska · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1994 · 43 citations

Natural Sciences, Materials Engineering, Materials Science +17

Quenching of ferromagnetism in cobalt clusters embedded in copper

D.A. Eastham, You Qiang, T H Maddock et al. · Journal of Physics Condensed Matter · 1997 · 35 citations

Natural Sciences, Materials Science, Physics +17