Compact suspended silicon microring resonators with ultrahigh quality

Abstract

We propose and demonstrate compact suspended silicon microring resonators with ultra-high optical quality. We achieve an intrinsic quality factor of 9.2 × 10(5) for the resonator with a radius of 9 μm. The high optical quality factor, high optical confinement together with the suspended structure of our device enable great potential for broad applications in biosensing, quantum photonics, nonlinear photonics, cavity optomechanics, and optical signal processing.