Publication | Closed Access
Embedded SiGe nanoparticles formed by atom beam co-sputtering of Si, Ge, SiO2
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Citations
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References
2009
Year
Materials ScienceNanoscale ScienceEngineeringPhysicsNanomaterialsNanotechnologyApplied PhysicsSiliceneSemiconductor Device FabricationSige NanoparticlesSilicon On InsulatorAtom Beam Co-sputtering
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