Atomic layer doping for Si - Concepedia

Concepedia

Publication | Closed Access

Atomic layer doping for Si

14

Citations

7

References

1993

Year

Detlev Grützmacher, K. Eberl, Adrian R. Powell, B. A. Ek, T.O. Sedwick, Swaminathan P. Iyer

Thin Solid Films

PhysicsApplied PhysicsSemiconductor MaterialSilicon On InsulatorAtomic Layer

References

	Year	Citations

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