An accelerometer incorporating a laser microencoder for a wide measurable range

A cantilever optical-fiber accelerometer

Jerzy Kalenik, Ryszard Pająk · Sensors and Actuators A Physical · 1998 · 92 citations

Engineering, Electrical Engineering, Instrumentation +11

A CMOS z-axis capacitive accelerometer with comb-finger sensing

Huikai Xie, Gary K. Fedder · 2002 · 79 citations

Engineering, Electrical Engineering, Mechatronics Engineering +17

Silicon-on-insulator optical rib waveguides: loss, mode characteristics, bends and y-junctions

Andrew Rickman, Graham T. Reed · IEE Proceedings - Optoelectronics · 1994 · 70 citations

Engineering, Materials Engineering, Materials Science +17

High-resolution micromachined interferometric accelerometer

E. B. Cooper, E. Rehmi Post, S. Griffith et al. · Applied Physics Letters · 2000 · 61 citations

Engineering, Electrical Engineering, Mechanical Engineering +17

Lateral optical accelerometer micromachined in (100) silicon with remote readout based on coherence modulation

Gerold Schröpfer, Wilhelm Elflein, M. de Labachelerie et al. · Sensors and Actuators A Physical · 1998 · 51 citations

Engineering, Electrical Engineering, Mechanical Engineering +16