Publication | Closed Access
Submicron polymer structures with X-ray lithography and hot embossing
43
Citations
11
References
2008
Year
Materials ScienceEngineeringBeam LithographyMicrofabricationPolymer ScienceApplied PhysicsFabrication TechniqueX-ray Lithography3D PrintingNanolithography Method
| Year | Citations | |
|---|---|---|
Page 1
Page 1