Concepedia

Publication | Closed Access

Characterization of a SAW-Pirani vacuum sensor for two different operating modes

DOI

16

Citations

10

References

2012

Year

Denis Mercier, G. Bordel, P. Brunet-Manquat, S. Verrun, Omar Elmazria, F. Sarry, B. Belgacem, J. Bounoua
Sensors and Actuators A Physical

References

YearCitations

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