Tandem Mass Spectrometer for Secondary Ion Studies

Abstract

An instrument permitting the study of ionization processes caused by ion and electron impact on solid surfaces under well defined conditions is described. It consists functionally of a single focusing mass spectrometer providing a monoisotopic and monoenergetic primary beam and a quadrupole mass spectrometer for the analysis of secondary ions released from a target surface. Low primary ion current densities and ultrahigh vacuum conditions allow investigations without essential alterations of the target surface during experiment. Some results demonstrating instrument performance are presented.