Influence of the Gas Humidity on the Uniformity of RF‐Powered Atmospheric‐Pressure Low‐Temperature DBD Plasmas

Abstract

Abstract The effect of the water level in a He working gas on the uniformity of the atmospheric pressure plasmas was investigated using emission spectroscopy. The 13.56 MHz rf‐powered dielectric barrier discharges were generated using He gas, in which water vapor of various concentrations was added. Electron density of the discharge medium determined using the emission spectra clearly demonstrated that the humidity level affects the electron density and the uniformity of the plasma. magnified image