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The influence of deposition parameters on room temperature ozone sensing properties of InOx films

Materials ScienceAdvanced Oxidation ProcessChemical EngineeringEnvironmental ChemistryEngineeringAtmospheric PhotochemistryDeposition ParametersSurface ScienceAir QualityInox FilmsChemistryOzoneThin FilmsAir PollutionChemical Vapor DepositionOzone Layer DepletionElectrochemical Gas SensorRoom Temperature Ozone