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Synthesis of transparent and hard SiOC(−H) thin films on polycarbonate substrates by PECVD method

Materials ScienceMaterials EngineeringHard SiocPolycarbonate SubstratesEngineeringSurface ScienceApplied PhysicsPecvd MethodThin Film MaterialsThin Film DevicesThin Film Process TechnologyThin FilmsChemical Vapor DepositionThin Film ProcessingThin-film Technology