Structure and coherence of NbAl multilayer films

Abstract

NbnAlm multilayer films grown on oxidized Si(100) at room temperature by magnetron sputtering have Nb[110] and A[111] texture. The films have ∼1% coherency strains which decrease with increasing modulation wavelength. The composition modulation is approximately a trapezoidal wave with interfacial regions ∼11 Å thick as a result of grain boundary diffusion.