Graded transmission dielectric optical masks by laser ablation

The influence of thermal diffusion on laser ablation of metal films

E. Matthias, Michael Reichling, Jan Siegel et al. · Applied Physics A · 1994 · 201 citations

Natural Sciences, Materials Engineering, Materials Science +15

Excimer laser micro machining of inorganic dielectrics

J. Ihlemann, B. Wolff‐Rottke · Applied Surface Science · 1996 · 113 citations

Engineering, Materials Engineering, Materials Science +14

Excimer laser ablation of polyimide in a manufacturing facility

J. R. Lankard, Gerhard E. Wolbold · Applied Physics A · 1992 · 88 citations

Engineering, Manufacturing Engineering, Materials Engineering +14

Excimer laser machining for the fabrication of analogous microstructures

K. Zimmer, D. Hirsch, F. Bigl · Applied Surface Science · 1996 · 68 citations

Engineering, Manufacturing Engineering, Materials Science +14

Excimer laser ablation patterning of dielectric layers

J. Ihlemann, B. Wolff‐Rottke · Applied Surface Science · 1995 · 29 citations

Natural Sciences, Materials Engineering, Materials Science +14