Publication | Closed Access
Young’s modulus evaluation by SAWs for porous silica low-k film with cesium doping
16
Citations
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References
2010
Year
Materials EngineeringMaterials ScienceMaterial AnalysisEngineeringCesium DopingOxide ElectronicsSurface ScienceApplied PhysicsYoung ’Material PerformanceThin Film Process TechnologyThin FilmsThin Film Processing
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