Design and performance of a laser-plasma-based compact soft x-ray microscope

Abstract

We describe the design of a user-friendly compact water-window x-ray microscope. The microscope is based on a λ=3.37 nm liquid-jet-target laser-plasma source in combination with a normal-incidence multilayer condenser mirror and high-resolution diffractive optics for the imaging. With its high mechanical and thermal stability, the instrument demonstrates enhanced resolution and potential for compact x-ray imaging with the quality of synchrotron-based microscopes. Furthermore, a new sample handling system, computer control, and other improvements facilitate application-oriented x-ray microscopy outside the synchrotron laboratory.