Metastable single-phase polycrystalline aluminium oxynitride films grown by MSIP: constitution and structure

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P. Oelhafen · Journal of Electron Spectroscopy and Related Phenomena · 1984 · 2.5K citations

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High Rate Thick Film Growth

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Use of the oxygen KLL Auger lines in identification of surface chemical states by electron spectroscopy for chemical analysis

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Natural Sciences, Chemistry, Materials Science +15

Al2O3 films for integrated optics

M.K. Smit, G.A. Acket, C. J. van der Laan · Thin Solid Films · 1986 · 110 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +13

An aluminum oxynitride film

Wang Dehuang, Guo Liang · Thin Solid Films · 1991 · 17 citations

Natural Sciences, Materials Engineering, Materials Science +12