Applied Physics A · 1998 · 13 citations · 0 references
Natural SciencesMaterials EngineeringMaterials ScienceElectronic MaterialsSemiconductor MaterialsThin FilmsAmorphous MaterialsAmorphous SemiconductorsAmorphous SolidsThin Film Mechanical PropertiesThin Film StrainThin-film MaterialsAmorphous SeleniumAmorphous SiliconFilm StrainFilm StressFilm-substrate InteractionMechanical Stress ResponsePhotoinduced Structural ChangesSilicon