Concepedia

Application of dynamic and combined magnetic fields in the 300mm silicon single-crystal growth

E. Tomzig, J. Virbulis, Wilfried von Ammon, Yuri Gelfgat, L. A. Gorbunov

Materials Science in Semiconductor Processing · 2002 · 26 citations · 3 references

DOI

Concepts

References

3

Numerical model of turbulent CZ melt flow in the presence of AC and CUSP magnetic fields and its verification in a laboratory facility

Th. Wetzel, A. Muižnieks, A. Mühlbauer et al. · Journal of Crystal Growth · 2001 · 34 citations

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Crystal growth melt flow control by means of magnetic fields

V. Galindo, G. Gerbeth, Wilfried von Ammon et al. · Energy Conversion and Management · 2002 · 30 citations

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Challenges for economical growth of high quality 300 mm CZ Si crystals

E. Tomzig, Wilfried von Ammon, E. Dornberger et al. · Microelectronic Engineering · 1999 · 16 citations

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