Ion-assisted selective deposition of aluminium for via-hole interconnections - Concepedia

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Ion-assisted selective deposition of aluminium for via-hole interconnections

11

Citations

16

References

1993

Year

AM Barklund, S. Berg, IV Katardjiev, C. Nender, Patrik Carlsson

Materials ScienceAluminium NitrideIon-assisted Selective DepositionEngineeringSurface ScienceApplied PhysicsElectronic PackagingChemical DepositionMicroelectronics

References

	Year	Citations

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