Novel MEMS pressure and temperature sensors fabricated on optical fibers

Abstract

We present the fabrication and initial testing of novel optically interrogated pressure and temperature sensors fabricated directly on optical fibers using microelectromechanical systems (MEMS) technology. A new micromachining process for use on a flat fiber end face that includes photolithographic patterning, wet etching of a cavity and anodic bonding of a silicon diaphragm is utilized. Two prototype pressure sensors, fabricated on 400 μm diameter multimode fibers, have been tested displaying an approximately linear response to static pressure (14–80 psi). A prototype temperature sensor, fabricated by anodically bonding an ultra-thin crystalline silicon onto a fiber end face, has been tested in the range 25–300 °C. A minimum detectable temperature variation of 6 °C is observed. Since these sensors are significantly miniaturized, they will find application in situations where small size is advantageous and where dense arrays may be useful.