Variation of Liquid and Solid Compositions during LPE Growth from a Ternary Component Solution

Abstract

A generalized calculation is presented to predict the variation of liquid and solid compositions during the liquid phase epitaxial growth from a ternary component solution under an equilibrium condition. Basic equations describing the fractional changes of liquid components are derived for the continuous process. Starting at a given initial condition the calculation based on an iterative procedure is carried out along on the theoretical liquidus surface with no adjustable parameters. The theory is applied to the growth of Ga 1- X Al X As as an example, resulting in good agreement with the experimental data.